Materials Analysis27FeaturesNon-destructive CharacterisationThe IR-VASE offers non-contact measurements of many different material properties including thickness optical constants, material composition, chemical bonding, doping concentration, and more. Measurements do not require vacuum and can be used to study liquid/solid interfaces common in biology and chemistry applications.No Baseline or Reference Sample RequiredEllipsometry is a modulation technique that does not require scans or reference samples to maintain accuracy. Even samples that are smaller than the beam diameter can be measured because the entire beam does not need to be collected.Highly Accurate MeasurementPatented calibration and data acquisition procedures remove effects of imperfect optical elements to provide accurate measurements of ???? and (.Alpha SE - Entry Level EllipsometerFor routine measurements of thin !lm thickness and refractive index, this ellipsometer allows you to mount a sample, choose the model that matches your !lm, and press "measure". You have results within$seconds.????????Wavelength Range: 380 nm to 900 nm ????????Angles of Incidence: 65°, 70°, 75° and straight-through (90°) ????????Patented Rotating Compensator (RCE) ????????Sample Alignment: computer automated. ????????The compensator in the alpha-SE rotates to increase accuracy and provide data over the full psi-delta plane.????????# of Wavelengths: 180 ????????Measurement Speed: 2-3 sec. (fast mode), 10 sec. (standard) ????????Small footprint: 19" wide by 12" deep ????????5-Site License of CompleteEASE software for Data Acquisition and Analysis ????????User-friendly software for quick, easy measurements of !lm thickness and refractive index (n and k).FeaturesEasy-to-UsePush-button operation is complemented by advanced software that takes care of the work for you.PowerfulProven spectroscopic ellipsometer technology gives you both thickness and index with much higher certainty than other techniques.FlexibleWorks with your materials - dielectrics, semiconductors, organics, and more.AffordableSpectroscopic ellipsometry for simple sample systems.FastHundreds of wavelengths simultaneously collected in seconds for immediate results.
Materials Analysis28www.lotoriel.co.ukStylus & Optical Surface Pro!lersKLA-Tencor Corporation is the world's leading supplier of process control and yield management solutions for the semiconductor and related microelectronics industries.A range of industries, including general scienti!c and materials research, optoelectronics, and data storage, require pro!lometry measurements of surface topography to either control their processes or research new material characteristics. Typical surface measurement parameters which we address include surface "atness, roughness, curvature, peak-to-valley, asperity, waviness, texture, volume, sphericity, slope, density, stress, bearing ratio, and distance mainly in the micron to nanometer range.2D and 3D Stylus Pro!lersAlpha Step D-100 & D120 Stylus Pro!lersThe KLA-Tencor Development Series of benchtop stylus pro!lers offer the most complete range of stylus measurement features to meet the needs of the engineering and research communities. These research-grade products merge capability and value with the tool performance expected from KLA-Tencor's metrology products.Features:Lowest commercially available stylus force of 0.03 mg0.38 Angstroms Resolution5 Angstroms Step Height RepeatabilityD-100: Up to 30 mm scan lengthD-120: Up to 200 mm scan length with scan stitchingFastest measurement cycle - load sample, focus, and then measureLoad up to 10 pro!les into a single axis view for$analysisOpen as many pro!le analysis windows as a user needsAuto step level and step detect functions simplifying the users experienceDynamic results table that supports standard Windows copy and paste and is exportable to any spreadsheetRe-analyze any data set at a later date without having to repeat any measurementsStylus Pro!lingD-100:The 140 mm sample stage supports scan lengths of up to 30 mm in a single scan and up to 80 mm utilizing the stitching function standard with each system. In addition, the D-100 low force sensor measures 800 um z-range standard and up to 1.2 mm optional. The precision scan stage and low force technology ensure the highest level of measurement quality on the most sensitive thin !lms and soft samples.D-120:The 200 mm sample stage supports scan lengths of up to 55 mm in a single scan and up to 200 mm utilizing the stitching function standard with each system. In addition, the D-120 low force sensor measures 800 um z-range standard and up to 1.2 mm optional. The precision scan stage and low force technology ensure the highest level of measurement quality on the most sensitive thin !lms and soft samples.