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Materials Analysis24www.lotoriel.co.ukSpectroscopic EllipsometersFor thin !lm characterisationJ A Woollam are the world market leaders in Spectroscopic Ellipsometry. Their Ellipsometers cover a broad wavelength range from 140 nm to 33 #m, capturing data simultaneously from all wavelengths in less than 5 seconds.J A Woollam Ellipsometers have a wide range of applications for thin !lm characterisation and have many upgrade options e.g. ex-situ or in-situ (deposition control & monitoring), automated sample and angle-of-incidence translation, variable temperature (heating or cooling), focusing optics, liquid cells etc.The all new powerful CompleteEASE analysis package provides a graphical interface for building models, displaying experimental data & model !ts. Using quick tab switching, you can get complete control of all the ellipsometer's functions, making acquisition of accurate SE data fast and easy.VASE - The Ultimate Research EllipsometerThe VASE is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more.It combines high accuracy and precision with a wide spectral range up to 193 to 2500 nm. Variable wavelength and angle of incidence allow "exible measurement capabilities including:????????Re"ection and Transmission Ellipsometry????????Transmittance (T) intensity ????????Generalized Ellipsometry????????Depolarization????????Re"ectance (R) intensity ????????Scatterometry????????Cross-polarized R/T????????Mueller-matrix FeaturesMaximum Data AccuracyThe VASE features a rotating analyzer ellipsometer (RAE) combined with our patented AutoRetarder for unparalleled data accuracy.High Precision Wavelength SelectionThe HS-190 scanning monochromator is designed speci!cally for spectroscopic ellipsometry. It optimizes speed, wavelength accuracy, and light throughput, while automatically controlling selection of wavelengths and spectral resolution.Flexible Measurements The V-VASE features a vertical sample mount to accommodate a large variety of measurement geometries including re"ection, transmission, and scattering.

Materials Analysis25M2000 for Fast In-situ or Ex-situ EllipsometryThe M-2000 line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin !lm characterisation. An advanced optical design, wide spectral range, and fast data acquisition make it an extremely powerful and versatile tool.The M-2000 delivers both speed and accuracy. Our patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect data from the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of con!gurations.FeaturesAdvanced Ellipsometer TechnologyThe M-2000 utilizes our patented RCE (rotating compensator ellipsometer) technology to achieve high accuracy and precision.Flexible System IntegrationWith modular optical design, the M-2000 can be attached directly to your process chamber or con!gured on any of our table-top bases.Fast Spectral DetectionThe RCE design is compatible with advancedCCD detection to measure ALL wavelengths simultaneously.AccuracyAdvanced design ensures accurate ellipsometry measurements for any sample.Wide Spectral RangeThis ellipsometer collects over 700 wavelengths from the ultraviolet to the near-infrared - simultaneously.M2000 ApplicationsThe speed, accuracy, and wide spectral range of the M-2000 make it ideal for a diverse range of measurements. The primary application of ellipsometry is to characterize !lm thickness and optical constants. The M-2000 excels at both. It measures !lm thickness from sub-nanometers up to tens of microns and the optical properties from transparent to absorbing materials. This "exible instrument can characterize any type of thin !lm: dielectric, organic, semiconductor, metal, and more. Wide spectral range and variable angle allow the M-2000 to diagnose many multi-layered structures.In-SituThe M-2000 is ideal for in-situ monitoring and process control. It is used successfully with a number of different processes to provide real-time results.QCM-DBoth spectroscopic ellipsometry (SE) and Quartz Crystal Microbalance with Dissipation (QCM-D) can detect sub-monolayer changes in thickness of nanometer scale !lms.However, the two techniques measure quite different things: QCM-D measures the mass and associated mechanical properties of the !lm, while SE measures volume (via thickness, since V = thick x Area) and associated optical properties.Combining these two complimentary techniques gives us new information that cannot be determined from either technique$alone.